Dynamik von Micro-Puls-Plasmen
Dynamik von Micro-Puls-Plasmen
Herbert Störi
(ORCID: )
Wissenschaftsdisziplinen
Andere Technische Wissenschaften (20%); Physik, Astronomie (80%)
Keywords
-
Plasma-CVD,
PACVD,
Gepulste Gleichstrom-Entladung,
Hart- stoffe TSP,
Gleichstrom-Entladun,
Plasma-CVD,
PACVD,
G,
Stoffe,
TSP
Forschungsstätte(n)
- Technische Universität Wien - 100%
Nationale Projektbeteiligte
- Johann Laimer, Technische Universität Wien , assoziierte:r Forschungspartner:in
Research Output
- 127 Zitationen
- 7 Publikationen
Publikationen
-
2005
Titel Discrimination Efficacy of Fecal Pollution Detection in Different Aquatic Habitats of a High-Altitude Tropical Country, Using Presumptive Coliforms, Escherichia coli, and Clostridium perfringens Spores DOI 10.1128/aem.71.1.65-71.2005 Typ Journal Article Autor Byamukama D Journal Applied and Environmental Microbiology Seiten 65-71 Link Publikation -
2004
Titel Eubacterial 16S-rDNA amplicon profiling: a rapid technique for comparison and differentiation of heterotrophic plate count communities from drinking water DOI 10.1016/j.ijfoodmicro.2003.08.014 Typ Journal Article Autor Farnleitner A Journal International Journal of Food Microbiology Seiten 333-345 -
2003
Titel Plasma dynamics as a key to successful upscaling of pulsed plasma processes DOI 10.1016/s0257-8972(03)00423-7 Typ Journal Article Autor Laimer J Journal Surface and Coatings Technology Seiten 118-123 -
2001
Titel Is there a way to improve the uniformity of TiN deposition conditions in large pulsed d.c. plasma CVD reactors? DOI 10.1016/s0042-207x(01)00148-8 Typ Journal Article Autor Kugler C Journal Vacuum Seiten 379-383 -
2001
Titel Dynamics of pulsed d.c. discharges used for PACVD – effect of additional high voltage pulses DOI 10.1016/s0257-8972(01)01208-7 Typ Journal Article Autor Kugler C Journal Surface and Coatings Technology Seiten 424-428 -
1999
Titel Dynamics of a pulsed DC discharge used for plasma-assisted chemical vapor deposition — a case study for titanium nitride deposition DOI 10.1016/s0257-8972(99)00486-7 Typ Journal Article Autor Beer T Journal Surface and Coatings Technology Seiten 331-336 -
1999
Titel Inhomogeneous deposition of TiN by pulsed PACVD caused by a plasma dynamic effect DOI 10.1016/s0257-8972(99)00257-1 Typ Journal Article Autor Beer T Journal Surface and Coatings Technology Seiten 1016-1023